Integral representation of the diffracted intensity from one‐dimensional stepped surfaces and epitaxial layers
作者:
J. M. Pimbley,
T.‐M. Lu,
期刊:
Journal of Applied Physics
(AIP Available online 1985)
卷期:
Volume 58,
issue 6
页码: 2184-2189
ISSN:0021-8979
年代: 1985
DOI:10.1063/1.335985
出版商: AIP
数据来源: AIP
摘要:
An integral representation of the diffracted intensity from one‐dimensional stepped surfaces and overlayers is obtained based on the single‐scattering (kinematic) theory. We find exact solutions for an arbitrary terrace or island size distribution on stepped surfaces or epitaxial layers in an extremely simple manner. This theory greatly expands the utility of the kinematic analysis of electron, atom, or grazing x‐ray diffraction data. A particularly useful area of application is the quantitative study of the nucleation kinetics during the epitaxial growth of thin films. Several surface ordering models are discussed in terms of this simplified approach.
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