High‐speed metal‐semiconductor‐metal waveguide photodetector on InP
作者:
J. B. D. Soole,
H. Schumacher,
R. Esagui,
H. P. LeBlanc,
R. Bhat,
M. A. Koza,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 55,
issue 21
页码: 2173-2175
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.102073
出版商: AIP
数据来源: AIP
摘要:
We demonstrate high‐speed performance of InGaAs barrier‐enhanced metal‐semiconductor‐metal (M‐S‐M) Schottky barrier photodetectors monolithically integrated with double‐heterostructure InP/InGaAsP/InP waveguides. Pulse response widths of 77 ps are recorded, with an associated 3 dB power bandwidth of 1.7 GHz. Photodetectors acting as both ‘‘taps’’ of the waveguided signal and as ‘‘terminal’’ devices were fabricated. These detectors have application in receivers which are integrated with semiconductor waveguides for on‐chip optical signal processing.
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