Extreme selectivity in the lift‐off of epitaxial GaAs films
作者:
Eli Yablonovitch,
T. Gmitter,
J. P. Harbison,
R. Bhat,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 51,
issue 26
页码: 2222-2224
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.98946
出版商: AIP
数据来源: AIP
摘要:
We have discovered conditions for the selective lift‐off of large area epitaxial AlxGa1−xAs films from the substrate wafers on which they were grown. A 500‐A˚‐thick AlAs release layer is selectivity etched away, leaving behind a high‐quality epilayer and a reusable GaAs substrate. We have measured a selectivity of ≳107between the release layer and Al0.4Ga0.6As. This process relies upon the creation of a favorable geometry for the outdiffusion of dissolved H2gas from the etching zone.
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