Effects of indium lattice hardening upon the growth and structural properties of large‐diameter, semi‐insulating GaAs crystals
作者:
S. McGuigan,
R. N. Thomas,
D. L. Barrett,
H. M. Hobgood,
B. W. Swanson,
期刊:
Applied Physics Letters
(AIP Available online 1986)
卷期:
Volume 48,
issue 20
页码: 1377-1379
ISSN:0003-6951
年代: 1986
DOI:10.1063/1.96914
出版商: AIP
数据来源: AIP
摘要:
The high‐pressure liquid encapsulated Czochralski growth of indium lattice‐hardened GaAs, from 3 kg melts, has resulted in low‐dislocation, large‐diameter crystals which exhibit thermally stable, semi‐insulating properties. Post‐growth boule annealing is found to be an effective stress‐relief treatment, which assures high wafer yields and extremely uniform electrical properties. Observed reductions in dislocation density for mid 1019cm−3In‐doped GaAs substrates indicate an apparent 28‐fold increase in the critically resolved shear stress of this material over undoped GaAs near the melting point. Polished substrates obtained from these crystals exhibit very little subsurface damage, approaching high‐quality silicon wafers in this respect.
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