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Electrical measurements of boron implanted silicon on sapphire and bulk silicon

 

作者: G. Alestig,   G. Holmén,   M. Mårtenson,   S. Peterström,  

 

期刊: Radiation Effects  (Taylor Available online 1980)
卷期: Volume 49, issue 1-3  

页码: 7-12

 

ISSN:0033-7579

 

年代: 1980

 

DOI:10.1080/00337578008243058

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Hall effect and sheet resistivity measurements have been performed on boron implantations in 1μmsilicon layers on sapphire (SOS), and in bulk silicon. The doses used were 1014, 1015and 1016ions/cm2, and implantation energies were 150 and 300 keV. The samples were annealed at temperatures between 300 and 800°C. As a rule the effective number of carriers in SOS was found to be about twice the number of carriers in bulk silicon. However, the mobility is lower in bulk silicon, resulting in a sheet resistivity almost the same in boron implanted SOS and bulk silicon.

 

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