AbstractA modified covell method for direct peak analysis has been applied to energy‐dispersiv X‐ray flourescence spectra. The method is background independent and is well‐suited to computerized data reduction. It provides acceptable precision, minimizes errors from instrumental gain shift, and permits peak overlap correction. Peak overlap errors exhibit both positive and negative nodes as a function of peak separation distance, and are corrected using concentration ratios determined from thin, single‐element standards. Peak precisions and overlaps are evaluated as a function of window width to aid in width selection. Least‐square polynomial smoothing prior to peak analysis significantly improves peak area precisions without significantly affecting their a