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A model for the build-up of disordered material in ion bombarded Si

 

作者: R.S. Nelson,  

 

期刊: Radiation Effects  (Taylor Available online 1977)
卷期: Volume 32, issue 1-2  

页码: 19-24

 

ISSN:0033-7579

 

年代: 1977

 

DOI:10.1080/00337577708237451

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

A new model based on experimental observation is developed for the build-up of disordered material in ion bombarded silicon. The model assumes that disordered zones are created in a background of migrating point defects, these zones then act as neutral sinks for such defects which interact with the zones and cause recrystallization. A simple steady state rate theory is developed to describe the build-up of disordered material with ion dose as a function of temperature. In general the theory predicts two distinct behaviour patterns depending on the temperature and the ion mass, namely a linear build-up with dose to complete disorder for heavy bombarding ions and a build-up to saturation at a relatively low level for light ions such as protons. However, in some special circumstances a transition region is predicted where the build-up of disorder approximately follows a (dose)frac12;relationship before reverting to a linear behaviour at high dose.

 

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