We report on the growth and properties of (Sr1−xCax)RuO3and Sr (Ru1−xTix)O3thin films obtained by sequential deposition of submonolayers from end members of each compound. Magnetization measurements as well as transport properties exhibit a very different behavior for each type of substitution. A simple model, which assumes a random distribution of the substituted sites, allows us to account quantitatively for the reduction of the magnetization with increased doping and further confirms the homogeneity of our samples. A strong distortion due to the presence of the Ti on the Ru site could explain the different behavior observed between both types of doping. ©1997 American Institute of Physics.