Ellipsometric analysis of built‐in electric fields in semiconductor heterostructures
作者:
Paul G. Snyder,
Jae E. Oh,
John A. Woollam,
R. E. Owens,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 51,
issue 10
页码: 770-772
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.98862
出版商: AIP
数据来源: AIP
摘要:
Measurements of Franz–Keldysh (FK) effects in GaAs‐AlxGa1−xAs heterostructures by variable angle of incidence spectroscopic ellipsometry are reported. The measured FK effects are due to the built‐in band bending at the surface and heterointerfaces, with no externally applied bias or modulating voltage. The polarity of the FK line shape indicates whether the field is uniform or nonuniform (inhomogeneous) in the direction along the growth axis, while the linewidth is determined by the peak field strength. This information can be used to characterize the doping concentration in the AlxGa1−xAs layer.
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