Thin, superconducting Tl‐Ba‐Ca‐Cu‐O films were grown using a two‐step fabrication process which involved the growth of Ba‐Ca‐Cu‐O films by reactive magnetron sputtering followed byexsituhigh‐temperature crystallization and thallination under thallium oxide vapors. Films were thallinated with both Tl2O3and Tl2Ba2CuO6as the source for thallium oxide vapors. Highly oriented films were obtained with thecaxis perpendicular to the surface of the film. Best films had aTc(R=0) of 104 K and a critical current density of 5×104A/cm2at 77 K.