Diamond membrane based x‐ray masks
作者:
B. Löchel,
H.‐L. Huber,
C.‐P. Klages,
L. Schäfer,
A. Bluhm,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1992)
卷期:
Volume 10,
issue 6
页码: 3217-3220
ISSN:1071-1023
年代: 1992
DOI:10.1116/1.585916
出版商: American Vacuum Society
关键词: DIAMONDS;CHEMICAL VAPOR DEPOSITION;MEMBRANES;FABRICATION;X RADIATION;OPACITY;MICROHARDNESS;YOUNG MODULUS;ETCHING;ROUGHNESS;diamonds
数据来源: AIP
摘要:
Diamond layers are of special interest for x‐ray mask fabrication because of their excellent optical and mechanical properties. Using a plasma activated chemical vapor deposition process, 2–5 μm thick diamond layers were deposited and characterized. Microhardness and Young’s modulus are found to be very close to the literature values of bulk diamond. A standard isotropic etching process was applied for membrane fabrication. The optical transparency and the thickness homogeneity were measured. Concerning surface roughness, scanning electron micrographs and atomic force measurements were evaluated. After irradiation of diamond masks with synchrotron light, a slight increase of optical transparency was found.
点击下载:
PDF
(462KB)
返 回