The spatial distribution of Si interstitial complex produced in silicon by hydrogen ion implantation
作者:
YuV. Gorelkinskii,
N.N. Nevinnyi,
V.A. Botvin,
期刊:
Radiation Effects
(Taylor Available online 1980)
卷期:
Volume 49,
issue 1-3
页码: 161-164
ISSN:0033-7579
年代: 1980
DOI:10.1080/00337578008243086
出版商: Taylor & Francis Group
数据来源: Taylor
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