Linearly polarized laser chemical vapor deposition of liquid crystalline polymer was carried out on the polyimide layer which was exposed with a linearly polarized laser. We used 4[&ohgr;(2-methylpropenoyloxy)hexyloxy]-4′-cyanobiphenyl as a source of polymer film and a KrF excimer laser as an UV laser light source. Before deposition, exposure to a polyimide layer on a substrate was performed through a photomask. In both exposed and nonexposed areas, the film was deposited during laser irradiation. The molecular orientation of the film in the exposed area was perpendicular to the polarization of the exposed laser beam while that in the nonexposed area was parallel to the polarization of a deposition laser beam. ©1997 American Institute of Physics.