Using an inductively coupled rf plasma operated at atmospheric pressure, superconducting thin films of Y1Ba2Cu3O7−xhave been growninsituon single‐crystal yttria‐stabilized zirconia [100] from an aerosol precursor. X‐ray diffraction and rocking curve results indicate that the films are highlyc‐axis oriented normal to the substrate with a lattice constant of 11.67–11.68 A˚. The full width at half maximum of these films ranges from 0.55° to 1.0°. The films have typicalTc’s of 86 K andJc’s in excess of 105A/cm2at 77 K and zero field; magnetic measurements reveal an anisotropy of 3:1 at 69 K. The dependence of the processing parameters on the transport properties of the superconducting films is discussed.