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Transmission Electron Microscopy of Cleaved Silicon

 

作者: D. R. Frankl,  

 

期刊: Journal of Applied Physics  （AIP Available online 1963）
卷期: Volume 34, issue 12  

页码: 3514-3516

 

ISSN:0021-8979

 

年代: 1963

 

DOI:10.1063/1.1729250

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Transmission electron micrographs of cleaved silicon samples show severe distortion near the cleavage marks and misorientation of the regions between marks. These results are interpreted as evidence for localized plastic deformation during cleavage.

 

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