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Titanium as a substrate for thin film PZT deposition

 

作者: PeterC. Knight,   JohnM. Bell,  

 

期刊: Integrated Ferroelectrics  （Taylor Available online 1995）
卷期: Volume 9, issue 1-3  

页码: 41-48

 

ISSN:1058-4587

 

年代: 1995

 

DOI:10.1080/10584589508012904

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

During high temperature processing an interface layer is formed between the PZT and Ti substrate by the oxidation of the substrate. The effects on the measured electrical properties of PZT are investigated using dielectric, IV and CV analysis.

 

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