Sol-gel derived ferroelectric thin films in silicon micromachining
作者:
C.-C. Hsueh,
T. Tamagawa,
C. Ye,
A. Helgeson,
D.L. Polla,
期刊:
Integrated Ferroelectrics
(Taylor Available online 1993)
卷期:
Volume 3,
issue 1
页码: 21-32
ISSN:1058-4587
年代: 1993
DOI:10.1080/10584589308216697
出版商: Taylor & Francis Group
关键词: ferroelectric;thin films;micromachining;piezoelectric;pyroelectric;microsensor;microactuator
数据来源: Taylor
摘要:
Ferroelectric thin films have been integrated with silicon micromechanical structures in the fabrication of microsensor and microactuator structures. Both the piezoelectric and pyroelectric effects in thin films of lead zirconate titanate (Pb(ZrxTi1_x)O3) and lead titanate (PbTiO3) have been used for physical force sensing (pressure sensor), thermal heat sensing (pyroelectric infrared detector) and microactuation (mechanical positioner). Solid-state micromachining is used to form mechanical membranes on a silicon wafer for implementing easily deformable membranes or structures with a low thermal mass. This paper demonstrates the compatible simultaneous integration of 1) sol-gel deposited ferroelectric thin films, 2) surface-machined micromechanical structures and 3) n-well CMOS integrated circuit technologies.
点击下载:
PDF (1077KB)
返 回