The cross sections of the1H(3He,1H)3He reaction have been measured at two different angles (20° and 30°) for3He particles incident energies between 1.9 and 3.0 MeV. This reaction offers an alternative to the classical1H(4He,1H)4He elastic recoil reaction and can be more attractive because3He incident particles induce nuclear reactions on light elements such as12C,14N, or16O. The new technique has been applied to silicon implanted with low energy hydrogen as well as a CxHy/Cu/CuxHy/Si specimen. For this multilayer, carbon, hydrogen, and carbon can be analyzed together using three different charge particle detectors. ©1996 American Institute of Physics.