Determination of Young's Modulus of Thin Films
作者:
Amedeo Maddalena,
期刊:
Journal of the American Ceramic Society
(WILEY Available online 1992)
卷期:
Volume 75,
issue 10
页码: 2915-2917
ISSN:0002-7820
年代: 1992
DOI:10.1111/j.1151-2916.1992.tb05533.x
出版商: Blackwell Publishing Ltd
数据来源: WILEY
摘要:
An improved vibrating‐reed method is described for determining Young's modulus of thin films deposited on both sides of a substrate. This technique consists of measuring the resonant frequency of a cantilever composite beam obtained by coating both sides of a substrate. The calculation procedure is presented to evaluate the film modulus from sample geometry, material density, and mechanical resonant frequency. For accurate determination of resonant frequency, the phase angle between the exciting and vibration signals is analyzed. Using the proposed technique, Young's modulus of ZrO2thin films is calculated, obtaining a value in agreement with literature dat
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