Effect of top electrode deposition rate on tunnel junction characteristics
作者:
M. A. Ocampo,
J. L. Heiras,
T. A. Will,
期刊:
Journal of Applied Physics
(AIP Available online 1982)
卷期:
Volume 53,
issue 5
页码: 3698-3701
ISSN:0021-8979
年代: 1982
DOI:10.1063/1.331156
出版商: AIP
数据来源: AIP
摘要:
We have found that the rate of deposition of Pb when fabricating thin film Al‐oxide‐Pb tunnel junctions has a small but reproducible effect on tunneling characteristics. Zero bias junction conductance is typically increased by a factor of 2 or more when the top electrode deposition rate is raised from 10 to 100 A˚/s. This change is associated principally with a reduction of the effective barrier height at the Pb interface.
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