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Effect of top electrode deposition rate on tunnel junction characteristics

 

作者: M. A. Ocampo,   J. L. Heiras,   T. A. Will,  

 

期刊: Journal of Applied Physics  (AIP Available online 1982)
卷期: Volume 53, issue 5  

页码: 3698-3701

 

ISSN:0021-8979

 

年代: 1982

 

DOI:10.1063/1.331156

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have found that the rate of deposition of Pb when fabricating thin film Al‐oxide‐Pb tunnel junctions has a small but reproducible effect on tunneling characteristics. Zero bias junction conductance is typically increased by a factor of 2 or more when the top electrode deposition rate is raised from 10 to 100 A˚/s. This change is associated principally with a reduction of the effective barrier height at the Pb interface.

 

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