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Isotope enrichment in sputter deposits

 

作者: G. K. Wehner,  

 

期刊: Applied Physics Letters  (AIP Available online 1977)
卷期: Volume 30, issue 4  

页码: 185-187

 

ISSN:0003-6951

 

年代: 1977

 

DOI:10.1063/1.89344

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The isotope ratio in metal deposits obtained by sputtering a flat target at low ion energy (100 eV) under normal ion incidence is a function of the ejection angle. The lighter isotope (s) are enriched in the direction normal to the target surface as result of ’’reflective collisions’’ which occur when an atom collides with one of heavier mass underneath. Experimental results are presented for Cu(63‐65) and the seven Mo isotopes.

 

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