Optical properties of epitaxial CoSi2/Si and CoSi2particles in Si from 0.062 to 2.76 eV
作者:
Z.‐C. Wu,
E. T. Arakawa,
J. R. Jimenez,
L. J. Schowalter,
期刊:
Journal of Applied Physics
(AIP Available online 1992)
卷期:
Volume 71,
issue 11
页码: 5601-5605
ISSN:0021-8979
年代: 1992
DOI:10.1063/1.350539
出版商: AIP
数据来源: AIP
摘要:
We have measured the optical properties of epitaxial CoSi2films on Si from 0.062 to 2.76 eV by ellipsometry and spectrophotometry. The energy dependencies of the dielectric constants show Drude behavior at energies lower than ∼0.2 eV with Drude parameters ℏ&ohgr;p=(5.8±0.2) eV and ℏ/&tgr;=(0.09±0.02) eV. Using the measured optical constants, the CoSi2film is shown to have maximum absorptance at a thickness of ∼20 nm for &lgr;≳1.4 &mgr;m. Finally, we have calculated the absorptance of a composite film of CoSi2particles embedded in Si and found that the absorptance peak due to a surface plasmon resonance in the CoSi2particles shifts to higher energy as the ellipsoidal particles become more elongated, in agreement with recent observations by Fathaueretal. [Phys. Rev. B44, 1345 (1991)].
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