首页   按字顺浏览 期刊浏览 卷期浏览 Optical properties of epitaxial CoSi2/Si and CoSi2particles in Si from 0.062 to 2.76 eV
Optical properties of epitaxial CoSi2/Si and CoSi2particles in Si from 0.062 to 2.76 eV

 

作者: Z.‐C. Wu,   E. T. Arakawa,   J. R. Jimenez,   L. J. Schowalter,  

 

期刊: Journal of Applied Physics  (AIP Available online 1992)
卷期: Volume 71, issue 11  

页码: 5601-5605

 

ISSN:0021-8979

 

年代: 1992

 

DOI:10.1063/1.350539

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have measured the optical properties of epitaxial CoSi2films on Si from 0.062 to 2.76 eV by ellipsometry and spectrophotometry. The energy dependencies of the dielectric constants show Drude behavior at energies lower than ∼0.2 eV with Drude parameters ℏ&ohgr;p=(5.8±0.2) eV and ℏ/&tgr;=(0.09±0.02) eV. Using the measured optical constants, the CoSi2film is shown to have maximum absorptance at a thickness of ∼20 nm for &lgr;≳1.4 &mgr;m. Finally, we have calculated the absorptance of a composite film of CoSi2particles embedded in Si and found that the absorptance peak due to a surface plasmon resonance in the CoSi2particles shifts to higher energy as the ellipsoidal particles become more elongated, in agreement with recent observations by Fathaueretal. [Phys. Rev. B44, 1345 (1991)].

 

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