首页   按字顺浏览 期刊浏览 卷期浏览 Improved circuit for potential fluctuation compensation in the plasma during the electr...
Improved circuit for potential fluctuation compensation in the plasma during the electron energy distribution function measurement by a probe

 

作者: S. Matsumura,   Sin‐Li Chen,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1979)
卷期: Volume 50, issue 11  

页码: 1425-1428

 

ISSN:0034-6748

 

年代: 1979

 

DOI:10.1063/1.1135732

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An improved circuit consisting of a simple voltage follower for the measurement of electron energy distribution function in a plasma has been proposed. This circuit makes it possible to eliminate the fluctuation of plasma space potential, the deviation of dc probe voltage caused by the probe current drawing across the plasma resistance, and the attenuation of the second derivative signal during the measurement, simultaneously. Both the probe circuit considerations and the experimental results are presented.

 

点击下载:  PDF (280KB)



返 回