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An analytical model for Type I magnetic contrast enhancement with sample tilting

 

作者: W. K. Chim,  

 

期刊: Journal of Applied Physics  (AIP Available online 1997)
卷期: Volume 82, issue 9  

页码: 4143-4147

 

ISSN:0021-8979

 

年代: 1997

 

DOI:10.1063/1.366214

 

出版商: AIP

 

数据来源: AIP

 

摘要:

In this article, an analytical model for Type I magnetic contrast enhancement in the scanning electron microscope, achieved by sample tilting, is presented. The model accounts for the energy filtering of the secondary electrons emitted from the sample. The results showed that the optimum sample tilt angle for maximum contrast is a function of the field-distance integral. For small field-distance integrals less than10−7 Tm,corresponding to a weak magnetic field situation, the optimum sample tilt is close to 0°. For large field-distance integrals, the optimum sample tilt angle increases and approaches 45° for a field-distance integral of8×10−6 Tm.©1997 American Institute of Physics.

 

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