Integrated GaAs‐AlxGa1−xAs injection lasers and detectors with etched reflectors
作者:
J. L. Merz,
R. A. Logan,
期刊:
Applied Physics Letters
(AIP Available online 1977)
卷期:
Volume 30,
issue 10
页码: 530-533
ISSN:0003-6951
年代: 1977
DOI:10.1063/1.89223
出版商: AIP
数据来源: AIP
摘要:
An integrated injection laser‐waveguide‐detector device is described, fabricated from AlxGa1−xAs layers grown by liquid‐phase epitaxy. Reflectors are formed by a two‐step preferential etch procedure. For a laser cavity formed by one etched reflector and one cleaved mirror, an overall differential transfer efficiency of 10±1% has been measured at the detector after transmission through a 1‐&mgr;m‐thick passive waveguide 250 &mgr;m long. If both reflectors are etched, efficiencies as high as 2% are still observed.
点击下载:
PDF
(328KB)
返 回