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Integrated GaAs‐AlxGa1−xAs injection lasers and detectors with etched reflectors

 

作者: J. L. Merz,   R. A. Logan,  

 

期刊: Applied Physics Letters  (AIP Available online 1977)
卷期: Volume 30, issue 10  

页码: 530-533

 

ISSN:0003-6951

 

年代: 1977

 

DOI:10.1063/1.89223

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An integrated injection laser‐waveguide‐detector device is described, fabricated from AlxGa1−xAs layers grown by liquid‐phase epitaxy. Reflectors are formed by a two‐step preferential etch procedure. For a laser cavity formed by one etched reflector and one cleaved mirror, an overall differential transfer efficiency of 10±1% has been measured at the detector after transmission through a 1‐&mgr;m‐thick passive waveguide 250 &mgr;m long. If both reflectors are etched, efficiencies as high as 2% are still observed.

 

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