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Studies of Si segregation in GaAs using current–voltage characteristics of quantum well infrared photodetectors

 

作者: Z. R. Wasilewski,   H. C. Liu,   M. Buchanan,  

 

期刊: Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena  (AIP Available online 1994)
卷期: Volume 12, issue 2  

页码: 1273-1276

 

ISSN:1071-1023

 

年代: 1994

 

DOI:10.1116/1.587020

 

出版商: American Vacuum Society

 

关键词: QUANTUM WELLS;GALLIUM ARSENIDES;SILICON ADDITIONS;PHOTODETECTORS;INFRARED RADIATION;CV CHARACTERISTIC;COMPUTERIZED SIMULATION;SEGREGATION;TEMPERATURE RANGE 0400−1000 K;DEFECT CLUSTERS;GaAs:Si

 

数据来源: AIP

 

摘要:

Segregation of Si in molecular beam epitaxy grown GaAs quantum wells is investigated using current–voltage characteristics (I–V) of quantum well infrared photodetectors. Theoretical modeling is used to derive the extent of segregation from the measured ratio of dark currents through the device in forward and reverse directions. The segregation length, expressed in Å per decade of concentration decay, increases from 12 to 52 Å on increasing the growth temperature from 550 to 605 °C. The character of this increase indicates that Si segregation is kinetically limited in this temperature range, but approaches thermal equilibrium above 600 °C. The effect of arsenic overpressure on the segregation length at a growth temperature of 595 °C is also studied. An increased overpressure of arsenic suppresses Si segregation for both dimeric and tetrameric forms of As. The effect of As2is very small, with the segregation length decreasing from 52 to 48 Å on increasing the arsenic flux by a factor of eight from its nominal value. The same increase in flux gives a much stronger suppression of Si segregation if As4is used: the segregation length decreases from 51 to 40 Å.

 

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