Electroluminescence (EL) and electrophysical characteristics of erbium and oxygen coimplanted and annealedp–njunctions, characterized by higher values of theEr3+-related EL intensity at∼1.54 &mgr;min the breakdown regime at 300 K as compared with that at 85 K, have been studied in the temperature range from 85 to 300 K. Hole traps in the Er–O codopednlayer were found to be responsible for the anomalous EL behavior. Er-related EL was observed in the same samples in avalanche breakdown at high temperatures and in tunnel breakdown at low temperatures. ©1998 American Institute of Physics.