Observation of a vacuum tunnel gap in a transmission electron microscope using a micromechanical tunneling microscope
作者:
M. I. Lutwyche,
Y. Wada,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 66,
issue 21
页码: 2807-2809
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.113482
出版商: AIP
数据来源: AIP
摘要:
This letter reports the observation of the vacuum tunnel gap between two conductors using a high resolution transmission electron microscope. A 2.5 mm square micromachined tunneling microscope chip has been fabricated with a minimum feature size of 0.4 &mgr;m. The chip fits into a modified side‐entry type transmission electron microscope holder. The tunnel gap is controlled by a purpose‐built feedback controller. The micromachines work reliably during observation of the tip apex in a transmission electron microscope, allowing the voltage and current to be changed while the tunnel gap is observed. ©1995 American Institute of Physics.
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