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Observation of a vacuum tunnel gap in a transmission electron microscope using a micromechanical tunneling microscope

 

作者: M. I. Lutwyche,   Y. Wada,  

 

期刊: Applied Physics Letters  (AIP Available online 1995)
卷期: Volume 66, issue 21  

页码: 2807-2809

 

ISSN:0003-6951

 

年代: 1995

 

DOI:10.1063/1.113482

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This letter reports the observation of the vacuum tunnel gap between two conductors using a high resolution transmission electron microscope. A 2.5 mm square micromachined tunneling microscope chip has been fabricated with a minimum feature size of 0.4 &mgr;m. The chip fits into a modified side‐entry type transmission electron microscope holder. The tunnel gap is controlled by a purpose‐built feedback controller. The micromachines work reliably during observation of the tip apex in a transmission electron microscope, allowing the voltage and current to be changed while the tunnel gap is observed. ©1995 American Institute of Physics.

 

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