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Laser‐induced chemical vapor deposition of aluminum

 

作者: Thomas H. Baum,   Carl E. Larson,   Robert L. Jackson,  

 

期刊: Applied Physics Letters  (AIP Available online 1989)
卷期: Volume 55, issue 12  

页码: 1264-1266

 

ISSN:0003-6951

 

年代: 1989

 

DOI:10.1063/1.101629

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The laser‐induced deposition of high‐purity aluminum metal has been achieved by pyrolytic decomposition of trimethylamine aluminum hydride. The chemical structure of the precursor affords a high ambient vapor pressure which results in rapid rates of aluminum film formation. In addition, the precursor is nonpyrophoric, in contrast to other trialkylaluminum precursors. These combined chemical and physical properties make trimethylamine aluminum hydride an ideal precursor for laser‐induced chemical vapor deposition of aluminun films.

 

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