Extraction of inelastic mean free path data from elastic electron backscattering data
作者:
V. M. Dwyer,
期刊:
Journal of Vacuum Science&Technology A: Vacuum, Surfaces, and Films
(AIP Available online 1994)
卷期:
Volume 12,
issue 5
页码: 2680-2684
ISSN:0734-2101
年代: 1994
DOI:10.1116/1.579088
出版商: American Vacuum Society
关键词: SURFACE ANALYSIS;ELECTRON SPECTROSCOPY;DATA ANALYSIS;SURFACE COLLISIONS;BACKSCATTERING;ELASTIC SCATTERING;MEAN FREE PATH;CHARGED−PARTICLE TRANSPORT
数据来源: AIP
摘要:
The possible extraction of inelastic mean free path (IMFP or λi) data from elastic backscattering experiments is analyzed within the transport approximation. It is found that the characteristic length obtained by this method is not the IMFP, λi, as previously thought, but a length Λ=[λ−1i(λ−1i+λ−1tr)]−1/2, where λtr, the transport mean free path, is the length associated with large‐angle deflection. It is significant that this length Λ is also the length which characterizes the overlayer experiment for an ultrathin overlayer (thickness≪IMFP) and at an exit angle of ∼45°, and is also the length obtained using two‐stream methods [V. M. Dwyer, Surf. Sci.291, 261 (1993)].
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