Second harmonic generation and atomic‐force microscopy studies of porous silicon
作者:
O. A. Aktsipetrov,
A. V. Melnikov,
Yu. N. Moiseev,
T. V. Murzina,
C. W. van Hasselt,
Th. Rasing,
G. Rikken,
期刊:
Applied Physics Letters
(AIP Available online 1995)
卷期:
Volume 67,
issue 9
页码: 1191-1193
ISSN:0003-6951
年代: 1995
DOI:10.1063/1.115003
出版商: AIP
数据来源: AIP
摘要:
Structural properties of porous silicon were studied with atomic‐force microscopy (AFM) and optical second harmonic generation (SHG). Depending on etching conditions, the SHG response was observed to be either anisotropic, showing C2vsymmetry, or isotropic. This correlated with AFM observations of quasi ordered structures in the first case. The Si etching process was studied byinsituSHG measurements. ©1995 American Institute of Physics.
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