The dielectric response as a function of temperature and film thickness of fiber-textured(Ba,Sr)TiO3thin films grown by chemical vapor deposition
作者:
Cem Basceri,
S. K. Streiffer,
Angus I. Kingon,
R. Waser,
期刊:
Journal of Applied Physics
(AIP Available online 1997)
卷期:
Volume 82,
issue 5
页码: 2497-2504
ISSN:0021-8979
年代: 1997
DOI:10.1063/1.366062
出版商: AIP
数据来源: AIP
摘要:
The temperature- and field-dependent permittivities of fiber-texturedBa0.7Sr0.3TiO3thin films grown by liquid-source metalorganic chemical vapor deposition were investigated as a function of film thickness. These films display a nonlinear dielectric response under conditions representative of those encountered in dynamic random access memories or other integrated capacitor applications. This behavior has the exact form expected for a classical nonlinear, nonhysteretic dielectric, as described in terms of a power series expansion of the free energy in the polarization as in the Landau–Ginzburg–Devonshire approach. Curie–Weiss-like behavior is exhibited above the bulk Curie point(∼300 K),although the ferroelectric phase transition appears frustrated. Small-signal capacitance measurements of films with different thicknesses (24–160 nm) indicate that only the first term in the power series expansion varies significantly with film thickness or temperature. Possible origins for this thickness dependence are discussed. ©1997 American Institute of Physics.
点击下载:
PDF
(207KB)
返 回