Exposure strategies for polymethyl methacrylate fromin situx‐ray absorption near edge structure spectroscopy
作者:
X. Zhang,
C. Jacobsen,
S. Lindaas,
S. Williams,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
(AIP Available online 1995)
卷期:
Volume 13,
issue 4
页码: 1477-1483
ISSN:1071-1023
年代: 1995
DOI:10.1116/1.588175
出版商: American Vacuum Society
关键词: PMMA;CHEMICAL RADIATION EFFECTS;SOFT X RADIATION;CHEMICAL BONDS;CROSS−LINKING
数据来源: AIP
摘要:
We have observed the chemical changes in PMMA irradiated by x raysinsitu. The chemical changes are monitored by micro‐x‐ray absorption near edge structure spectra at the carbon absorption edge. The loss of the ester group (C=O) and formation of C=C bonds have been determined quantitatively from changes in the intensities of the respective π* resonant peaks as a function of dose. Samples prepared under different conditions were examined. From the dose dependence of bond formation, scission and linking, the performance of the resist can be predicted, so that the preparation strategy, dose, and development can be optimized.
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