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Time‐resolved temperature measurement of pulsed laser irradiated germanium by thin‐film thermocouple

 

作者: P. Baeri,   S. U. Campisano,   E. Rimini,   Jing Ping Zhang,  

 

期刊: Applied Physics Letters  （AIP Available online 1984）
卷期: Volume 45, issue 4  

页码: 398-400

 

ISSN:0003-6951

 

年代: 1984

 

DOI:10.1063/1.95234

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Iron‐constantan thin film thermocouples overlaid with Ge layers 1 &mgr;m thick are used to measure the temperature‐time dependence during irradiation with nanosecond Nd glass laser pulses. The response of the thermocouple is fast enough to allow the measurements of the temperature rise and fall. The obtained temperature values are in good agreement with the thermal model of laser annealing.

 

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