Molecular beam epitaxy of GaSb
作者:
K. F. Longenbach,
W. I. Wang,
期刊:
Applied Physics Letters
(AIP Available online 1991)
卷期:
Volume 59,
issue 19
页码: 2427-2429
ISSN:0003-6951
年代: 1991
DOI:10.1063/1.106037
出版商: AIP
数据来源: AIP
摘要:
Thep‐type nature of unintentionally doped GaSb molecular beam epitaxy grown layers has been attributed to native defects resulting from insufficient Sb incorporation. As a means to improve the quality of GaSb epilayers, growth on (311) Bsubstrates was studied and shown to produce Te‐doped GaSb layers with room‐temperature mobilities of 6780 cm2/V s at carrier densities of 9×1015cm−3and AlGaSb/GaSbp‐i‐ndiode structures with breakdown voltages as high as 20 V. These mobilities and breakdown voltages are the highest achieved for molecular beam epitaxy grown GaSb‐based structures.
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