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DOUBLE INJECTION IN EVAPORATED SILICON FILMS

 

作者: M. Braunstein,   A. I. Braunstein,   R. Zuleeg,  

 

期刊: Applied Physics Letters  (AIP Available online 1967)
卷期: Volume 10, issue 11  

页码: 313-315

 

ISSN:0003-6951

 

年代: 1967

 

DOI:10.1063/1.1754826

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have observed negative resistance behavior in evaporated silicon films at room temperature and at liquid nitrogen temperatures which we believe is due to double injection. This, to our knowledge, is the first reporting of double injection in silicon thin films, as well as the first reporting of an active device prepared from silicon thin films. Sample lengths in previous work have ranged from one hundred to several thousand microns. The films used in our work are 0.4 to 0.6 &mgr; thick.

 

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