DOUBLE INJECTION IN EVAPORATED SILICON FILMS
作者:
M. Braunstein,
A. I. Braunstein,
R. Zuleeg,
期刊:
Applied Physics Letters
(AIP Available online 1967)
卷期:
Volume 10,
issue 11
页码: 313-315
ISSN:0003-6951
年代: 1967
DOI:10.1063/1.1754826
出版商: AIP
数据来源: AIP
摘要:
We have observed negative resistance behavior in evaporated silicon films at room temperature and at liquid nitrogen temperatures which we believe is due to double injection. This, to our knowledge, is the first reporting of double injection in silicon thin films, as well as the first reporting of an active device prepared from silicon thin films. Sample lengths in previous work have ranged from one hundred to several thousand microns. The films used in our work are 0.4 to 0.6 &mgr; thick.
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