Ion energy control in an insulating inductively coupled discharge reactor
作者:
Brian A. Smith,
Lawrence J. Overzet,
期刊:
Applied Physics Letters
(AIP Available online 1997)
卷期:
Volume 70,
issue 15
页码: 1950-1952
ISSN:0003-6951
年代: 1997
DOI:10.1063/1.118788
出版商: AIP
数据来源: AIP
摘要:
An electrically insulating plasma reactor with a Faraday shielded inductive source antenna permits direct control of the dc plasma potential of the discharge. This control may be used to provide a tailored ion energy distribution at a substrate of fixed potential or to fix the plasma potential at a chosen value. With a reactor constructed from Pyrex tubing and a Faraday shielded inductive source coil, all that is required to control the plasma potential is a small electrostatic probe in contact with the plasma. By applying a stairstep potential to the probe, it is possible to create an ion energy distribution possessing virtually any desired shape. Insulating reactors could provide a novel way to control ion production and ion energy separately without the need for direct substrate biasing. They may also provide a way to maintain a consistent plasma potential in a processing reactor in situations where the reactor walls are easily contaminated by the process. ©1997 American Institute of Physics.
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