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Ion energy control in an insulating inductively coupled discharge reactor

 

作者: Brian A. Smith,   Lawrence J. Overzet,  

 

期刊: Applied Physics Letters  (AIP Available online 1997)
卷期: Volume 70, issue 15  

页码: 1950-1952

 

ISSN:0003-6951

 

年代: 1997

 

DOI:10.1063/1.118788

 

出版商: AIP

 

数据来源: AIP

 

摘要:

An electrically insulating plasma reactor with a Faraday shielded inductive source antenna permits direct control of the dc plasma potential of the discharge. This control may be used to provide a tailored ion energy distribution at a substrate of fixed potential or to fix the plasma potential at a chosen value. With a reactor constructed from Pyrex tubing and a Faraday shielded inductive source coil, all that is required to control the plasma potential is a small electrostatic probe in contact with the plasma. By applying a stairstep potential to the probe, it is possible to create an ion energy distribution possessing virtually any desired shape. Insulating reactors could provide a novel way to control ion production and ion energy separately without the need for direct substrate biasing. They may also provide a way to maintain a consistent plasma potential in a processing reactor in situations where the reactor walls are easily contaminated by the process. ©1997 American Institute of Physics.

 

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