首页   按字顺浏览 期刊浏览 卷期浏览 Ion channeling in textured polycrystalline diamond films
Ion channeling in textured polycrystalline diamond films

 

作者: R. Samlenski,   G. Flemig,   R. Brenn,   C. Wild,   W. Mu¨ller‐Sebert,   P. Koidl,  

 

期刊: Journal of Applied Physics  （AIP Available online 1993）
卷期: Volume 74, issue 3  

页码: 2134-2136

 

ISSN:0021-8979

 

年代: 1993

 

DOI:10.1063/1.354741

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Channeling of H+and H2+ions of energies between 1.0 and 2.0 MeV in ⟨100⟩‐textured polycrystalline diamond films grown by microwave plasma‐assisted chemical‐vapor deposition has been observed with Rutherford backscattering. The width of the orientational distribution of the diamond crystallites as deduced from the measured projectile velocity dependence of the observed channeling angular scans amounted to about 1°.

 

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