Protective films prepared by the electron cyclotron resonance plasma chemical vapor deposition technique for phase‐change‐type optical disks
作者:
Yasuyuki Sugiyama,
Susumu Fujimori,
Hiroki Yamazaki,
Iwao Hatakeyama,
期刊:
Applied Physics Letters
(AIP Available online 1990)
卷期:
Volume 56,
issue 15
页码: 1403-1405
ISSN:0003-6951
年代: 1990
DOI:10.1063/1.102481
出版商: AIP
数据来源: AIP
摘要:
Hydrogenated amorphous silicon carbide (a‐SiC:H) films are prepared by the electron cyclotron resonance plasma chemical vapor deposition (ECR PCVD) technique. The films are, for the first time, applied as protective layers for phase‐change‐type optical disks. Three kinds of films with different hydrogen contents are investigated to improve writing sensitivity. The writing laser power required to obtain a sufficient carrier‐to‐noise ratio is 11 mW at a 10 m/s linear velocity, which corresponds to a 30% power reduction compared to conventional rf‐sputtered ZnS protective layers. This is attributed to the decreased thermal conductivity of these protective layers. The hydrogen in the films is confirmed to be thermally stable.
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