Sheath structure in a plane probe inmersed in an electronegative plasma
作者:
J. I. Ferna´ndez Palop,
J. Ballesteros,
V. Colomer,
M. A. Herna´ndez,
A. Dengra,
期刊:
Journal of Applied Physics
(AIP Available online 1995)
卷期:
Volume 77,
issue 7
页码: 2937-2944
ISSN:0021-8979
年代: 1995
DOI:10.1063/1.358709
出版商: AIP
数据来源: AIP
摘要:
The sheath zone near a plane probe inmersed in an electronegative plasma is analyzed. A theoretical model for the sheath zone was used to derive a new expression for the Bohm criterion. The new expression holds at any negative probe potential. Solving the model equations allows one to obtain a wealth of information including the spatial distribution of various quantities (electric field, potential, and particle densities), the sheath thickness, and the floating potential. ©1995 American Institute of Physics.
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