首页   按字顺浏览 期刊浏览 卷期浏览 Sheath structure in a plane probe inmersed in an electronegative plasma
Sheath structure in a plane probe inmersed in an electronegative plasma

 

作者: J. I. Ferna´ndez Palop,   J. Ballesteros,   V. Colomer,   M. A. Herna´ndez,   A. Dengra,  

 

期刊: Journal of Applied Physics  (AIP Available online 1995)
卷期: Volume 77, issue 7  

页码: 2937-2944

 

ISSN:0021-8979

 

年代: 1995

 

DOI:10.1063/1.358709

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The sheath zone near a plane probe inmersed in an electronegative plasma is analyzed. A theoretical model for the sheath zone was used to derive a new expression for the Bohm criterion. The new expression holds at any negative probe potential. Solving the model equations allows one to obtain a wealth of information including the spatial distribution of various quantities (electric field, potential, and particle densities), the sheath thickness, and the floating potential. ©1995 American Institute of Physics.

 

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