High‐performance, low‐noise digital controller for inchworm piezoelectric translators
作者:
X. Chen,
B. Cousins,
M. McEllistrem,
R. J. Hamers,
期刊:
Review of Scientific Instruments
(AIP Available online 1992)
卷期:
Volume 63,
issue 10
页码: 4308-4313
ISSN:0034-6748
年代: 1992
DOI:10.1063/1.1143729
出版商: AIP
数据来源: AIP
摘要:
We have designed and constructed a high‐performance, low‐noise digital controller for ‘‘inchworm’’ piezoelectric translators. The controller features a maximum output voltage of 700 V, an rms noise level of less than 2 mV, and is capable of driving inchworms at speeds of up to 0.23 mm/s. The controller offers substantially better performance in terms of resolution, noise, speed, and cost than commercial controllers, and is suitable for atomic resolution scanning tunneling microscopy and atomic force microscopy applications.
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