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High‐performance, low‐noise digital controller for inchworm piezoelectric translators

 

作者: X. Chen,   B. Cousins,   M. McEllistrem,   R. J. Hamers,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1992)
卷期: Volume 63, issue 10  

页码: 4308-4313

 

ISSN:0034-6748

 

年代: 1992

 

DOI:10.1063/1.1143729

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have designed and constructed a high‐performance, low‐noise digital controller for ‘‘inchworm’’ piezoelectric translators. The controller features a maximum output voltage of 700 V, an rms noise level of less than 2 mV, and is capable of driving inchworms at speeds of up to 0.23 mm/s. The controller offers substantially better performance in terms of resolution, noise, speed, and cost than commercial controllers, and is suitable for atomic resolution scanning tunneling microscopy and atomic force microscopy applications.

 

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