Enhanced tail diffusion of ion implanted boron in silicon
作者:
D. Fan,
J. Huang,
R. J. Jaccodine,
P. Kahora,
F. Stevie,
期刊:
Applied Physics Letters
(AIP Available online 1987)
卷期:
Volume 50,
issue 24
页码: 1745-1747
ISSN:0003-6951
年代: 1987
DOI:10.1063/1.97735
出版商: AIP
数据来源: AIP
摘要:
The enhanced diffusion tail of implanted boron in Si was studied using conventional furnace annealing. Surface layer stripping was applied to remove part of the sample before annealing in order to distinguish the effect of the defect‐rich surface region from the tail region on the enhanced diffusion of boron. The boron concentration profiles were obtained with secondary ion mass spectrometry (SIMS). Spreading resistance profiles were also measured to compare with the SIMS profiles. The results show that implantation‐induced damage in the surface region is responsible for the enhanced boron diffusion. Channeled boron in the tail of the implantation profile becomes activated during annealing and has little effect on the tail redistribution during annealing.
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