首页   按字顺浏览 期刊浏览 卷期浏览 Lattice disorder in germanium by boron ion bombardment
Lattice disorder in germanium by boron ion bombardment

 

作者: D. Sigurd,   G. Fladda,   L. Eriksson,   K. Björkqvist,  

 

期刊: Radiation Effects  (Taylor Available online 1970)
卷期: Volume 3, issue 2  

页码: 145-147

 

ISSN:0033-7579

 

年代: 1970

 

DOI:10.1080/00337577008236267

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The lattice disorder produced in germanium by 56keV boron-ion bombardment has been measured using the channeling-effect technique. The dependence on dose (1014-1016ions/cm2) and implantation temperature (−90 °C to +130°C) has been studied. It is found that at room-temperature, each incident boron ion creates −10 times more disorder in germanium than in silicon. It is remarked that, contrary to the present results, previously established anneal stages generally occur at significantly lower temperatures in germanium than in silicon.

 

点击下载:  PDF (256KB)



返 回