Several experimental approaches have been considered to address the problem of detecting and quantifying the ionic contamination in semiconductor cleanroom consumables such as wipers. A relatively new analytical technique called capillary ion analysis (CIA) appeared to us as an outstanding and convenient tool for the separation and quantification of both cationic and anionic species present in cleanroom wipers. Multiple wipers were used for extraction in high-purity deionized water to derive better sampling averages, as well as to enhance the levels of ions in solution. The resulting extract solution was preconcentrated by evaporation to further increase the signals from the released ionic species.