Nonrandom doping and elastic scattering of carriers in semiconductors
作者:
A. F. J. Levi,
S. L. McCall,
P. M. Platzman,
期刊:
Applied Physics Letters
(AIP Available online 1989)
卷期:
Volume 54,
issue 10
页码: 940-942
ISSN:0003-6951
年代: 1989
DOI:10.1063/1.100814
出版商: AIP
数据来源: AIP
摘要:
High‐density delta doping of semiconductors may result in partial ordering of dopant atoms. Under suitable circumstances, periodic delta doping leads to significant suppression of elastic scattering and a consequent enhancement in charge carrier mobility.
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