Structural characterization of GaAs/ZnSe interfaces
作者:
M. C. Tamargo,
J. L. de Miguel,
D. M. Hwang,
H. H. Farrell,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1988)
卷期:
Volume 6,
issue 2
页码: 784-787
ISSN:0734-211X
年代: 1988
DOI:10.1116/1.584331
出版商: American Vacuum Society
关键词: GALLIUM ARSENIDES;ZINC SELENIDES;MOLECULAR BEAM EPITAXY;INTERFACES;INTERFACE PHENOMENA;VAPOR DEPOSITED COATINGS;SURFACE STRUCTURE;INTERFACE STRUCTURE;TRANSMISSION ELECTRON MICROSCOPY;THIN FILMS;NUCLEATION;CRYSTAL DEFECTS;GaAS;ZnSe
数据来源: AIP
摘要:
We have studied, using reflection high energy electron diffraction (RHEED), the initial growth stages of ZnSe layers grown by molecular beam epitaxy (MBE) on GaAs exhibiting various surface terminations. The structural quality of the ZnSe layers was assessed by transmission electron microscopy (TEM). We have observed a preference for two‐dimensional nucleation on As‐terminated GaAs substrates, whether epitaxial or bulk. On Ga‐terminated surfaces a transitional region of three‐dimensional growth forms initially. The different behaviors may reflect the electronic imbalance present in the growing GaAs/ZnSe interface. While defect free, thin layers of ZnSe are best obtained on As‐terminated GaAs, the initial three‐dimensional growth region on the Ga‐rich surfaces appears to reduce the density of extended faults formed in thick ZnSe layers due to the lattice mismatch with GaAs.
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