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Sputtering of Au by 45‐keV ions for different fluences

 

作者: E. P. EerNisse,  

 

期刊: Applied Physics Letters  (AIP Available online 1976)
卷期: Volume 29, issue 1  

页码: 14-17

 

ISSN:0003-6951

 

年代: 1976

 

DOI:10.1063/1.88877

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Measurements are presented of absolute sputtering coefficientsSfor polycrystalline Au bombarded by 45‐keV ions withZionranging from 2 to 79. Low‐fluence results taken with chemically etched Au surfaces represent the first complete set ofSvalues taken under the nearly ideal sputtering conditions of vanishingly small ion fluence and undamaged target surface. The results confirm unambiguously the smooth monotonic increase inSwithZionas predicted by sputtering theory. High‐fluence results are also obtained which are representative of implanted‐target surface conditions. These results exhibit the periodic variation ofSwithZionas seen in past sputtering investigations.

 

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