Peltier‐induced liquid phase epitaxy and compositional control of mm‐thick layers of (Al,Ga)As
作者:
J. J. Daniele,
A. J. Hebling,
期刊:
Journal of Applied Physics
(AIP Available online 1981)
卷期:
Volume 52,
issue 6
页码: 4325-4327
ISSN:0021-8979
年代: 1981
DOI:10.1063/1.329247
出版商: AIP
数据来源: AIP
摘要:
Epilayers of (Alx,Ga1−x)As(0.03<x<0.38) up to 1.4 mm thick were grown for the first time by Peltier‐induced liquid phase epitaxy (LPE) (electro epitaxy). The epilayers were analyzed with photoluminescence microanalysis and showed thick segments (up to 600 &mgr;m) of extremely uniform aluminum composition. Compositionally graded regions varied from lowXSALASto highXSALASin moving from the bottom to the top of the layer. The growth was performed at constant furnace temperature (T = 800 °C), with a small solution volume (15 g) and with an electric current of 10 A/cm2as the sole driving force for the growth. The compatibility of this technique with the growth of complex multilayer structures was demonstrated.
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