AbstractThe electron‐impact energy dependence of the dissociation cross sections of CF4and CHF3into the CFx(x = 1 − 3) free radicals was previously reported, in which the absolute values of the cross sections were tentatively estimated based on certain assumptions for the unknown ionization cross sections of the CF2and CF radicals. These assumptions are no longer needed, since a complete set of absolute parent and dissociative ionization cross sections of CFxradicals has been reported recently by Becker and co‐workers. Based on these data, the absolute cross sections for the electron‐impact neutral dissociation of CF4and CHF3into CF3, CF2and CF from the threshold up to 200–300 eV have now been accurately calibrated. Adjustments to the previously reported absolute cross sections of up to a factor of 16 were