Micropatterning of surfaces by excimer laser projection
作者:
James H. Brannon,
期刊:
Journal of Vacuum Science&Technology B: Microelectronics Processing and Phenomena
(AIP Available online 1989)
卷期:
Volume 7,
issue 5
页码: 1064-1071
ISSN:0734-211X
年代: 1989
DOI:10.1116/1.584595
出版商: American Vacuum Society
关键词: EXCIMER LASERS;MICROELECTRONICS;FABRICATION;LIGHT SOURCES;LITHOGRAPHY;PATTERN RECOGNITION;SURFACES;ABLATION;POLYIMIDES;POLYMERS;CARBON FLUORIDES;ETCHING;COPPER;SILICON;CHLORINE;VAPORS;OPTICAL PROPERTIES;polyimide;Cu;Si
数据来源: AIP
摘要:
In the coming years, excimer lasers will play two important roles in microelectronic fabrication: as new light sources for submicron photolithography, and for direct surface patterning by ablation or etching. Using this latter application, results are presented for 248 nm excimer laser formation of micron‐sized patterns in several materials by image projection. Photoablation was used to produce patterning in polyimide and a fluorocarbon polymer, while micropatterning by photoetching is demonstrated in copper and silicon using chlorine vapor. The results are discussed both in terms of the optical characteristics of the projection apparatus, and from the point of material response.
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